31
2
C               -0.9777     -1.3332     -0.2281
C               -0.9243     -0.0793      0.2957
C               -0.4840     -2.5573      0.5476
Si               1.1334      0.4146     -0.0735
C               -1.7013      1.0468     -0.3109
O               -2.1033      1.9633      0.4116
C               -2.0392      0.9701     -1.7643
H               -1.1724      0.6216     -2.3757
H               -2.3575      1.9773     -2.1345
H               -2.8911      0.2583     -1.9046
C               -0.7251      0.0832      1.8049
H               -1.3604     -1.5381     -1.2428
C                1.7529     -1.0249      0.9412
C                0.9407      0.2402     -1.9223
C                0.9104      2.0875      0.7249
Cl               4.1990      1.1103     -0.6719
H                1.8994      0.4487     -2.4108
H                0.1864      0.9505     -2.2797
H                0.6232     -0.7811     -2.1618
H                2.8488     -1.0311      0.9354
H                1.3800     -1.9618      0.5118
H                1.3935     -0.9269      1.9719
H                1.8590      2.6357      0.6955
H                0.5965      1.9562      1.7667
H                0.1448      2.6527      0.1811
H                0.2233     -0.3800      2.1002
H               -1.5506     -0.4034      2.3369
H               -0.7053      1.1494      2.0581
H                0.6119     -2.5680      0.5543
H               -0.8552     -3.4692      0.0660
H               -0.8552     -2.5112      1.5778
31
M1
C               -0.9823     -1.3345     -0.2214
C               -0.9381     -0.0828      0.3009
C               -0.4856     -2.5558      0.5568
Si               1.1628      0.4219     -0.0830
C               -1.7081      1.0437     -0.3108
O               -2.1034      1.9659      0.4060
C               -2.0452      0.9622     -1.7639
H               -1.1762      0.6164     -2.3734
H               -2.3674      1.9666     -2.1369
H               -2.8932      0.2463     -1.9032
C               -0.7355      0.0859      1.8090
H               -1.3593     -1.5422     -1.2370
C                1.7616     -1.0378      0.9151
C                0.9301      0.2667     -1.9290
C                0.9385      2.0801      0.7451
Cl               4.1908      1.1089     -0.6897
H                1.8789      0.4771     -2.4357
H                0.1708      0.9830     -2.2630
H                0.6041     -0.7511     -2.1718
H                2.8574     -1.0584      0.9109
H                1.3771     -1.9645      0.4740
H                1.4018     -0.9475      1.9464
H                1.8854      2.6315      0.7210
H                0.6296      1.9299      1.7859
H                0.1689      2.6523      0.2145
H                0.2180     -0.3680      2.1025
H               -1.5548     -0.4066      2.3451
H               -0.7245      1.1529      2.0590
H                0.6104     -2.5645      0.5623
H               -0.8558     -3.4695      0.0779
H               -0.8558     -2.5077      1.5873
31
M2
C               -0.9868     -1.3359     -0.2150
C               -0.9518     -0.0864      0.3059
C               -0.4870     -2.5543      0.5658
Si               1.1924      0.4292     -0.0926
C               -1.7148      1.0404     -0.3109
O               -2.1035      1.9685      0.4002
C               -2.0512      0.9542     -1.7638
H               -1.1798      0.6111     -2.3712
H               -2.3772      1.9559     -2.1394
H               -2.8952      0.2341     -1.9019
C               -0.7458      0.0886      1.8129
H               -1.3581     -1.5464     -1.2315
C                1.7700     -1.0505      0.8885
C                0.9190      0.2937     -1.9345
C                0.9668      2.0720      0.7652
Cl               4.1826      1.1074     -0.7077
H                1.8876      0.2561     -2.4459
H                0.3544      1.1653     -2.2851
H                0.3544     -0.6197     -2.1539
H                2.8657     -1.0735      0.9038
H                1.3917     -1.9678      0.4230
H                1.3917     -0.9787      1.9146
H                1.9484      2.5042      0.9909
H                0.4098      1.9239      1.6974
H                0.4098      2.7524      0.1109
H                0.3273      0.1143      2.0344
H               -1.2086     -0.7506      2.3447
H               -1.2086      1.0272      2.1383
H                0.6089     -2.5611      0.5701
H               -0.8561     -3.4699      0.0896
H               -0.8561     -2.5043      1.5965
31
M3
C               -0.9913     -1.3371     -0.2085
C               -0.9654     -0.0900      0.3108
C               -0.4884     -2.5527      0.5747
Si               1.2220      0.4365     -0.1023
C               -1.7215      1.0373     -0.3111
O               -2.1034      1.9711      0.3944
C               -2.0570      0.9462     -1.7636
H               -1.1834      0.6059     -2.3691
H               -2.3870      1.9452     -2.1420
H               -2.8972      0.2221     -1.9007
C               -0.7560      0.0912      1.8166
H               -1.3569     -1.5506     -1.2259
C                1.7782     -1.0627      0.8614
C                0.9076      0.3212     -1.9390
C                0.9953      2.0633      0.7852
Cl               4.1746      1.1061     -0.7256
H                1.8646      0.2877     -2.4721
H                0.3368      1.1972     -2.2677
H                0.3368     -0.5891     -2.1555
H                2.8734     -1.0971      0.8835
H                1.3938     -1.9694      0.3805
H                1.3938     -1.0016      1.8860
H                1.9766      2.4918      1.0190
H                0.4381      1.8980      1.7144
H                0.4381      2.7552      0.1433
H                0.3176      0.1175      2.0356
H               -1.2178     -0.7456      2.3530
H               -1.2178      1.0313      2.1391
H                0.6076     -2.5575      0.5778
H               -0.8564     -3.4701      0.1013
H               -0.8564     -2.5007      1.6058
31
M4
C               -0.9956     -1.3385     -0.2021
C               -0.9789     -0.0936      0.3157
C               -0.4895     -2.5512      0.5836
Si               1.2517      0.4438     -0.1120
C               -1.7280      1.0340     -0.3113
O               -2.1032      1.9737      0.3885
C               -2.0627      0.9382     -1.7636
H               -1.1869      0.6006     -2.3671
H               -2.3966      1.9345     -2.1447
H               -2.8990      0.2100     -1.8996
C               -0.7661      0.0939      1.8202
H               -1.3555     -1.5548     -1.2205
C                1.7862     -1.0746      0.8337
C                0.8958      0.3488     -1.9422
C                1.0239      2.0540      0.8052
Cl               4.1667      1.1046     -0.7437
H                1.8405      0.3200     -2.4971
H                0.3189      1.2290     -2.2484
H                0.3189     -0.5583     -2.1556
H                2.8809     -1.1207      0.8624
H                1.3958     -1.9704      0.3374
H                1.3958     -1.0242      1.8566
H                2.0050      2.4786      1.0471
H                0.4666      1.8713      1.7311
H                0.4666      2.7572      0.1759
H                0.3080      0.1209      2.0367
H               -1.2269     -0.7405      2.3611
H               -1.2269      1.0355      2.1398
H                0.6065     -2.5539      0.5854
H               -0.8564     -3.4705      0.1129
H               -0.8564     -2.4973      1.6149
31
M5
C               -0.9997     -1.3399     -0.1958
C               -0.9922     -0.0972      0.3205
C               -0.4907     -2.5497      0.5923
Si               1.2816      0.4510     -0.1219
C               -1.7343      1.0308     -0.3116
O               -2.1029      1.9762      0.3826
C               -2.0682      0.9302     -1.7636
H               -1.1901      0.5953     -2.3652
H               -2.4060      1.9237     -2.1474
H               -2.9006      0.1978     -1.8986
C               -0.7761      0.0965      1.8238
H               -1.3539     -1.5590     -1.2151
C                1.7939     -1.0862      0.8055
C                0.8838      0.3770     -1.9445
C                1.0529      2.0438      0.8248
Cl               4.1589      1.1031     -0.7619
H                2.8878     -1.1442      0.8405
H                1.3974     -1.9707      0.2940
H                1.3974     -1.0462      1.8264
H                1.8156      0.3536     -2.5212
H                0.3012      1.2611     -2.2275
H                0.3012     -0.5272     -2.1549
H                2.0337      2.4643      1.0748
H                0.4954      1.8439      1.7470
H                0.4954      2.7583      0.2085
H                0.2984      0.1241      2.0378
H               -1.2360     -0.7355      2.3691
H               -1.2360      1.0396      2.1405
H                0.6053     -2.5506      0.5928
H               -0.8565     -3.4708      0.1242
H               -0.8565     -2.4940      1.6239
31
M6
C               -1.0038     -1.3412     -0.1897
C               -1.0055     -0.1007      0.3252
C               -0.4918     -2.5482      0.6009
Si               1.3116      0.4583     -0.1318
C               -1.7406      1.0276     -0.3120
O               -2.1025      1.9789      0.3765
C               -2.0738      0.9223     -1.7637
H               -1.1934      0.5901     -2.3633
H               -2.4154      1.9130     -2.1503
H               -2.9022      0.1858     -1.8976
C               -0.7860      0.0992      1.8271
H               -1.3523     -1.5631     -1.2099
C                1.8015     -1.0974      0.7768
C                0.8716      0.4054     -1.9454
C                1.0819      2.0332      0.8442
Cl               4.1512      1.1017     -0.7802
H                1.7897      0.3880     -2.5438
H                0.2834      1.2931     -2.2047
H                0.2834     -0.4959     -2.1525
H                2.8945     -1.1677      0.8178
H                1.3988     -1.9702      0.2502
H                1.3988     -1.0676      1.7957
H                2.0624      2.4495      1.1021
H                0.5242      1.8160      1.7623
H                0.5242      2.7587      0.2410
H                0.2890      0.1273      2.0387
H               -1.2449     -0.7304      2.3770
H               -1.2449      1.0437      2.1409
H                0.6042     -2.5471      0.6002
H               -0.8565     -3.4711      0.1357
H               -0.8565     -2.4903      1.6328
31
M7
C               -1.0079     -1.3426     -0.1836
C               -1.0188     -0.1043      0.3298
C               -0.4929     -2.5467      0.6095
Si               1.3415      0.4656     -0.1419
C               -1.7470      1.0244     -0.3125
O               -2.1021      1.9814      0.3703
C               -2.0793      0.9142     -1.7640
H               -1.1967      0.5848     -2.3616
H               -2.4248      1.9023     -2.1533
H               -2.9038      0.1737     -1.8968
C               -0.7958      0.1017      1.8304
H               -1.3507     -1.5673     -1.2047
C                1.8087     -1.1080      0.7475
C                0.8593      0.4340     -1.9453
C                1.1109      2.0219      0.8634
Cl               4.1435      1.1001     -0.7986
H                1.7632      0.4232     -2.5651
H                0.2658      1.3249     -2.1804
H                0.2658     -0.4645     -2.1491
H                2.9005     -1.1908      0.7943
H                1.3999     -1.9688      0.2061
H                1.3999     -1.0881      1.7642
H                2.0912      2.4336      1.1294
H                0.5531      1.7872      1.7772
H                0.5531      2.7584      0.2738
H                0.2797      0.1304      2.0394
H               -1.2538     -0.7254      2.3847
H               -1.2538      1.0477      2.1412
H                0.6031     -2.5437      0.6075
H               -0.8565     -3.4714      0.1470
H               -0.8565     -2.4869      1.6417
31
M8
C               -1.0119     -1.3440     -0.1776
C               -1.0320     -0.1081      0.3343
C               -0.4939     -2.5451      0.6179
Si               1.3716      0.4727     -0.1520
C               -1.7531      1.0210     -0.3132
O               -2.1015      1.9839      0.3640
C               -2.0846      0.9061     -1.7643
H               -1.1998      0.5793     -2.3600
H               -2.4341      1.8914     -2.1563
H               -2.9053      0.1614     -1.8961
C               -0.8055      0.1044      1.8334
H               -1.3490     -1.5716     -1.1997
C                1.8159     -1.1185      0.7178
C                0.8469      0.4627     -1.9437
C                1.1402      2.0098      0.8822
Cl               4.1360      1.0987     -0.8171
H                1.7360      0.4592     -2.5847
H                0.2484      1.3565     -2.1541
H                0.2484     -0.4333     -2.1442
H                2.9065     -1.2140      0.7700
H                1.4011     -1.9669      0.1618
H                1.4011     -1.1085      1.7322
H                2.1203      2.4168      1.1561
H                0.5823      1.7578      1.7913
H                0.5823      2.7570      0.3064
H                0.2704      0.1337      2.0398
H               -1.2625     -0.7201      2.3924
H               -1.2625      1.0519      2.1413
H                0.6021     -2.5402      0.6146
H               -0.8564     -3.4716      0.1581
H               -0.8564     -2.4834      1.6503
31
M9
C               -1.0159     -1.3454     -0.1717
C               -1.0452     -0.1117      0.3386
C               -0.4948     -2.5436      0.6262
Si               1.4016      0.4800     -0.1623
C               -1.7593      1.0178     -0.3139
O               -2.1011      1.9864      0.3576
C               -2.0900      0.8981     -1.7648
H               -1.2029      0.5740     -2.3585
H               -2.4434      1.8807     -2.1595
H               -2.9068      0.1493     -1.8955
C               -0.8154      0.1070      1.8363
H               -1.3473     -1.5759     -1.1947
C                1.8227     -1.1281      0.6876
C                0.8346      0.4919     -1.9411
C                1.1695      1.9972      0.9007
Cl               4.1283      1.0972     -0.8356
H                1.7082      0.4963     -2.6029
H                0.2314      1.3880     -2.1263
H                0.2314     -0.4017     -2.1382
H                2.9118     -1.2368      0.7450
H                1.4018     -1.9640      0.1172
H                1.4018     -1.1277      1.6995
H                2.1494      2.3992      1.1825
H                0.6114      1.7279      1.8048
H                0.6114      2.7549      0.3390
H                0.2610      0.1367      2.0403
H               -1.2714     -0.7151      2.3997
H               -1.2714      1.0558      2.1412
H                0.6012     -2.5368      0.6216
H               -0.8563     -3.4719      0.1692
H               -0.8563     -2.4799      1.6589
31
M10
C               -1.0198     -1.3468     -0.1661
C               -1.0583     -0.1153      0.3428
C               -0.4958     -2.5421      0.6344
Si               1.4318      0.4872     -0.1728
C               -1.7654      1.0146     -0.3148
O               -2.1005      1.9889      0.3510
C               -2.0954      0.8901     -1.7654
H               -1.2060      0.5687     -2.3571
H               -2.4526      1.8699     -2.1629
H               -2.9082      0.1372     -1.8950
C               -0.8251      0.1095      1.8392
H               -1.3455     -1.5801     -1.1900
C                1.8293     -1.1374      0.6568
C                0.8223      0.5211     -1.9372
C                1.1989      1.9839      0.9188
Cl               4.1208      1.0957     -0.8544
H                1.6798      0.5343     -2.6197
H                0.2147      1.4193     -2.0967
H                0.2147     -0.3702     -2.1311
H                2.9167     -1.2593      0.7191
H                1.4022     -1.9602      0.0722
H                1.4022     -1.1463      1.6661
H                2.1786      2.3808      1.2083
H                0.6407      1.6973      1.8174
H                0.6407      2.7520      0.3714
H                0.2518      0.1398      2.0406
H               -1.2801     -0.7101      2.4070
H               -1.2801      1.0598      2.1411
H                0.6002     -2.5334      0.6286
H               -0.8562     -3.4722      0.1802
H               -0.8562     -2.4763      1.6673
31
M11
C               -1.0238     -1.3482     -0.1604
C               -1.0715     -0.1189      0.3470
C               -0.4967     -2.5405      0.6425
Si               1.4618      0.4945     -0.1832
C               -1.7717      1.0113     -0.3157
O               -2.1000      1.9915      0.3444
C               -2.1008      0.8820     -1.7661
H               -1.2092      0.5634     -2.3558
H               -2.4619      1.8592     -2.1662
H               -2.9097      0.1250     -1.8946
C               -0.8349      0.1122      1.8419
H               -1.3438     -1.5843     -1.1852
C                1.8357     -1.1462      0.6256
C                0.8104      0.5503     -1.9319
C                1.2284      1.9701      0.9365
Cl               4.1132      1.0942     -0.8732
H                1.6512      0.5728     -2.6345
H                0.1987      1.4499     -2.0653
H                0.1987     -0.3389     -2.1225
H                2.9213     -1.2817      0.6924
H                1.4027     -1.9557      0.0269
H                1.4027     -1.1644      1.6322
H                2.2080      2.3617      1.2337
H                0.6702      1.6664      1.8295
H                0.6702      2.7483      0.4037
H                0.2424      0.1429      2.0407
H               -1.2889     -0.7048      2.4142
H               -1.2889      1.0639      2.1407
H                0.5992     -2.5299      0.6353
H               -0.8560     -3.4724      0.1911
H               -0.8560     -2.4727      1.6757
31
M12
C               -1.0278     -1.3497     -0.1548
C               -1.0847     -0.1226      0.3511
C               -0.4977     -2.5390      0.6504
Si               1.4918      0.5016     -0.1938
C               -1.7779      1.0080     -0.3167
O               -2.0996      1.9939      0.3377
C               -2.1062      0.8739     -1.7668
H               -1.2123      0.5580     -2.3546
H               -2.4712      1.8483     -2.1697
H               -2.9112      0.1128     -1.8943
C               -0.8448      0.1147      1.8445
H               -1.3421     -1.5886     -1.1806
C                1.8419     -1.1545      0.5939
C                0.7985      0.5797     -1.9256
C                1.2580      1.9555      0.9538
Cl               4.1055      1.0926     -0.8921
H                1.6222      0.6123     -2.6478
H                0.1831      1.4803     -2.0324
H                0.1831     -0.3076     -2.1131
H                2.9254     -1.3036      0.6649
H                1.4029     -1.9504     -0.0184
H                1.4029     -1.1816      1.5978
H                2.2374      2.3416      1.2586
H                0.6996      1.6347      1.8407
H                0.6996      2.7436      0.4359
H                0.2330      0.1459      2.0410
H               -1.2979     -0.6998      2.4212
H               -1.2979      1.0678      2.1404
H                0.5982     -2.5266      0.6420
H               -0.8559     -3.4727      0.2018
H               -0.8559     -2.4693      1.6839
31
M13
C               -1.0319     -1.3511     -0.1493
C               -1.0979     -0.1264      0.3552
C               -0.4988     -2.5374      0.6583
Si               1.5219      0.5087     -0.2043
C               -1.7841      1.0046     -0.3178
O               -2.0991      1.9964      0.3310
C               -2.1117      0.8658     -1.7675
H               -1.2155      0.5526     -2.3533
H               -2.4806      1.8374     -2.1732
H               -2.9128      0.1006     -1.8939
C               -0.8546      0.1174      1.8469
H               -1.3405     -1.5929     -1.1759
C                1.8478     -1.1623      0.5621
C                0.7870      0.6090     -1.9177
C                1.2875      1.9405      0.9706
Cl               4.0979      1.0911     -0.9110
H                1.5931      0.6524     -2.6590
H                0.1683      1.5101     -1.9977
H                0.1683     -0.2766     -2.1023
H                2.9290     -1.3253      0.6368
H                1.4029     -1.9443     -0.0637
H                1.4029     -1.1981      1.5631
H                2.2668      2.3210      1.2828
H                0.7290      1.6029      1.8512
H                0.7290      2.7382      0.4676
H                0.2237      0.1490      2.0408
H               -1.3066     -0.6944      2.4282
H               -1.3066      1.0719      2.1396
H                0.5971     -2.5231      0.6485
H               -0.8559     -3.4728      0.2125
H               -0.8559     -2.4657      1.6920
31
M14
C               -1.0360     -1.3525     -0.1439
C               -1.1112     -0.1300      0.3591
C               -0.4999     -2.5359      0.6661
Si               1.5518      0.5160     -0.2151
C               -1.7904      1.0014     -0.3190
O               -2.0987      1.9989      0.3241
C               -2.1172      0.8578     -1.7685
H               -1.2188      0.5473     -2.3523
H               -2.4900      1.8267     -2.1768
H               -2.9144      0.0884     -1.8938
C               -0.8645      0.1199      1.8493
H               -1.3389     -1.5971     -1.1715
C                1.8536     -1.1692      0.5297
C                0.7760      0.6383     -1.9089
C                1.3171      1.9251      0.9870
Cl               4.0902      1.0896     -0.9301
H                1.5640      0.6931     -2.6686
H                0.1542      1.5393     -1.9617
H                0.1542     -0.2458     -2.0906
H                2.9324     -1.3462      0.6079
H                1.4028     -1.9371     -0.1093
H                1.4028     -1.2136      1.5277
H                2.2963      2.2996      1.3065
H                0.7586      1.5706      1.8608
H                0.7586      2.7322      0.4992
H                0.2142      0.1520      2.0406
H               -1.3155     -0.6893      2.4350
H               -1.3155      1.0758      2.1390
H                0.5959     -2.5197      0.6551
H               -0.8559     -3.4730      0.2232
H               -0.8559     -2.4621      1.7001
31
M15
C               -1.0402     -1.3540     -0.1386
C               -1.1246     -0.1337      0.3628
C               -0.5011     -2.5344      0.6739
Si               1.5816      0.5231     -0.2259
C               -1.7969      0.9980     -0.3203
O               -2.0985      2.0014      0.3172
C               -2.1228      0.8496     -1.7695
H               -1.2221      0.5419     -2.3514
H               -2.4995      1.8158     -2.1806
H               -2.9161      0.0762     -1.8938
C               -0.8746      0.1224      1.8514
H               -1.3374     -1.6015     -1.1671
C                1.8592     -1.1757      0.4970
C                0.7654      0.6676     -1.8989
C                1.3468      1.9091      1.0027
Cl               4.0823      1.0880     -0.9492
H                1.5351      0.7348     -2.6763
H                0.1410      1.5680     -1.9242
H                0.1410     -0.2151     -2.0782
H                2.9354     -1.3667      0.5783
H                1.4026     -1.9292     -0.1549
H                1.4026     -1.2284      1.4919
H                2.3260      2.2775      1.3294
H                0.7883      1.5380      1.8697
H                0.7883      2.7253      0.5305
H                0.2045      0.1550      2.0404
H               -1.3247     -0.6840      2.4415
H               -1.3247      1.0798      2.1380
H                0.5947     -2.5164      0.6614
H               -0.8560     -3.4733      0.2337
H               -0.8560     -2.4586      1.7080
31
M16
C               -1.0445     -1.3555     -0.1333
C               -1.1381     -0.1374      0.3666
C               -0.5024     -2.5329      0.6815
Si               1.6113      0.5303     -0.2368
C               -1.8034      0.9947     -0.3216
O               -2.0983      2.0038      0.3102
C               -2.1285      0.8415     -1.7706
H               -1.2256      0.5365     -2.3505
H               -2.5091      1.8050     -2.1843
H               -2.9179      0.0639     -1.8938
C               -0.8847      0.1249      1.8535
H               -1.3360     -1.6058     -1.1628
C                1.8647     -1.1815      0.4640
C                0.7554      0.6966     -1.8877
C                1.3764      1.8925      1.0181
Cl               4.0744      1.0864     -0.9684
H                1.5062      0.7766     -2.6821
H                0.1287      1.5958     -1.8854
H                0.1287     -0.1850     -2.0647
H                2.9380     -1.3867      0.5480
H                1.4024     -1.9204     -0.2004
H                1.4024     -1.2423      1.4559
H                2.3556      2.2547      1.3518
H                0.8179      1.5050      1.8778
H                0.8179      2.7176      0.5615
H                0.1948      0.1578      2.0400
H               -1.3338     -0.6789      2.4480
H               -1.3338      1.0837      2.1371
H                0.5933     -2.5130      0.6678
H               -0.8563     -3.4735      0.2442
H               -0.8563     -2.4550      1.7159
31
M17
C               -1.0489     -1.3569     -0.1281
C               -1.1516     -0.1412      0.3704
C               -0.5039     -2.5312      0.6891
Si               1.6411      0.5374     -0.2476
C               -1.8099      0.9913     -0.3230
O               -2.0981      2.0063      0.3032
C               -2.1343      0.8334     -1.7716
H               -1.2291      0.5311     -2.3495
H               -2.5188      1.7941     -2.1881
H               -2.9198      0.0517     -1.8937
C               -0.8948      0.1276      1.8555
H               -1.3347     -1.6101     -1.1584
C                1.8700     -1.1868      0.4309
C                0.7461      0.7254     -1.8753
C                1.4060      1.8756      1.0329
Cl               4.0665      1.0849     -0.9876
H                1.4778      0.8190     -2.6859
H                0.1175      1.6227     -1.8451
H                0.1175     -0.1552     -2.0504
H                2.9403     -1.4063      0.5173
H                1.4020     -1.9108     -0.2459
H                1.4020     -1.2555      1.4196
H                2.3851      2.2315      1.3734
H                0.8475      1.4718      1.8850
H                0.8475      2.7092      0.5919
H                0.1851      0.1609      2.0394
H               -1.3429     -0.6734      2.4546
H               -1.3429      1.0877      2.1359
H                0.5918     -2.5095      0.6740
H               -0.8566     -3.4736      0.2546
H               -0.8566     -2.4513      1.7237
31
M18
C               -1.0534     -1.3583     -0.1230
C               -1.1653     -0.1448      0.3740
C               -0.5054     -2.5297      0.6965
Si               1.6706      0.5446     -0.2587
C               -1.8166      0.9881     -0.3245
O               -2.0982      2.0088      0.2960
C               -2.1402      0.8254     -1.7728
H               -1.2327      0.5258     -2.3488
H               -2.5286      1.7833     -2.1921
H               -2.9218      0.0396     -1.8939
C               -0.9053      0.1301      1.8575
H               -1.3335     -1.6143     -1.1543
C                1.8751     -1.1913      0.3974
C                0.7374      0.7542     -1.8620
C                1.4356      1.8582      1.0471
Cl               4.0583      1.0834     -1.0070
H                1.4497      0.8622     -2.6879
H                0.1073      1.6491     -1.8037
H                0.1073     -0.1256     -2.0357
H                2.9423     -1.4251      0.4857
H                1.4016     -1.9003     -0.2914
H                1.4016     -1.2676      1.3828
H                2.4147      2.2075      1.3943
H                0.8771      1.4382      1.8914
H                0.8771      2.7000      0.6221
H                0.1751      0.1637      2.0389
H               -1.3524     -0.6682      2.4609
H               -1.3524      1.0916      2.1347
H                0.5902     -2.5061      0.6800
H               -0.8571     -3.4737      0.2648
H               -0.8571     -2.4477      1.7313
31
M19
C               -1.0581     -1.3598     -0.1178
C               -1.1792     -0.1485      0.3777
C               -0.5070     -2.5281      0.7041
Si               1.6999      0.5518     -0.2696
C               -1.8236      0.9847     -0.3259
O               -2.0984      2.0113      0.2889
C               -2.1463      0.8172     -1.7740
H               -1.2366      0.5204     -2.3480
H               -2.5386      1.7725     -2.1959
H               -2.9240      0.0273     -1.8940
C               -0.9157      0.1327      1.8594
H               -1.3325     -1.6186     -1.1500
C                1.8800     -1.1953      0.3635
C                0.7293      0.7825     -1.8478
C                1.4649      1.8405      1.0607
Cl               4.0500      1.0818     -1.0263
H                1.4222      0.9053     -2.6881
H                0.0981      1.6743     -1.7614
H                0.0981     -0.0967     -2.0203
H                2.9438     -1.4434      0.4535
H                1.4010     -1.8889     -0.3369
H                1.4010     -1.2791      1.3458
H                2.4441      2.1831      1.4144
H                0.9064      1.4047      1.8969
H                0.9064      2.6902      0.6517
H                0.1650      0.1667      2.0383
H               -1.3618     -0.6628      2.4672
H               -1.3618      1.0956      2.1335
H                0.5885     -2.5027      0.6862
H               -0.8576     -3.4739      0.2752
H               -0.8576     -2.4441      1.7391
31
M20
C               -1.0629     -1.3613     -0.1128
C               -1.1932     -0.1522      0.3813
C               -0.5090     -2.5264      0.7115
Si               1.7292      0.5589     -0.2807
C               -1.8306      0.9814     -0.3274
O               -2.0987      2.0137      0.2817
C               -2.1526      0.8091     -1.7752
H               -1.2406      0.5150     -2.3472
H               -2.5487      1.7616     -2.1999
H               -2.9263      0.0151     -1.8941
C               -0.9264      0.1352      1.8612
H               -1.3316     -1.6229     -1.1459
C                1.8849     -1.1986      0.3297
C                0.7222      0.8105     -1.8326
C                1.4944      1.8222      1.0738
Cl               4.0416      1.0802     -1.0457
H                1.3953      0.9489     -2.6864
H                0.0901      1.6985     -1.7180
H                0.0901     -0.0682     -2.0044
H                2.9451     -1.4611      0.4209
H                1.4005     -1.8768     -0.3820
H                1.4005     -1.2896      1.3086
H                2.4735      2.1581      1.4339
H                0.9359      1.3707      1.9017
H                0.9359      2.6795      0.6809
H                0.1548      0.1695      2.0376
H               -1.3715     -0.6575      2.4733
H               -1.3715      1.0994      2.1322
H                0.5865     -2.4993      0.6923
H               -0.8584     -3.4739      0.2856
H               -0.8584     -2.4402      1.7467
31
M21
C               -1.0681     -1.3620     -0.1052
C               -1.2076     -0.1551      0.3873
C               -0.5112     -2.5241      0.7214
Si               1.7584      0.5652     -0.2949
C               -1.8380      0.9789     -0.3264
O               -2.0995      2.0169      0.2770
C               -2.1592      0.8018     -1.7740
H               -1.2449      0.5104     -2.3440
H               -2.5592      1.7516     -2.2014
H               -2.9290      0.0037     -1.8918
C               -0.9375      0.1385      1.8654
H               -1.3311     -1.6265     -1.1392
C                1.8898     -1.2021      0.2927
C                0.7161      0.8373     -1.8197
C                1.5239      1.8028      1.0832
Cl               4.0332      1.0777     -1.0681
H                1.3695      0.9920     -2.6860
H                0.0835      1.7209     -1.6769
H                0.0835     -0.0410     -1.9914
H                2.9463     -1.4789      0.3847
H                1.4002     -1.8647     -0.4300
H                1.4002     -1.3001      1.2683
H                2.5031      2.1317      1.4495
H                0.9654      1.3358      1.9025
H                0.9654      2.6674      0.7066
H                0.1441      0.1730      2.0394
H               -1.3816     -0.6515      2.4819
H               -1.3816      1.1040      2.1332
H                0.5843     -2.4978      0.6970
H               -0.8633     -3.4731      0.3012
H               -0.8557     -2.4332      1.7579
31
M22
C               -1.0731     -1.3641     -0.1026
C               -1.2218     -0.1596      0.3884
C               -0.5132     -2.5232      0.7263
Si               1.7871      0.5733     -0.3028
C               -1.8451      0.9748     -0.3305
O               -2.0999      2.0187      0.2673
C               -2.1655      0.7930     -1.7777
H               -1.2490      0.5042     -2.3458
H               -2.5696      1.7400     -2.2078
H               -2.9316     -0.0093     -1.8945
C               -0.9482      0.1403      1.8646
H               -1.3304     -1.6315     -1.1376
C                1.8944     -1.2031      0.2616
C                0.7104      0.8656     -1.7999
C                1.5528      1.7851      1.0980
Cl               4.0242      1.0772     -1.0844
H                2.9470     -1.4941      0.3541
H                1.3996     -1.8500     -0.4718
H                1.3996     -1.3080      1.2339
H                2.5322      2.1070      1.4702
H                0.9944      1.3030      1.9086
H                0.9944      2.6566      0.7377
H                1.3439      1.0370     -2.6776
H                0.0776      1.7440     -1.6289
H                0.0776     -0.0126     -1.9719
H                0.1337      0.1751      2.0359
H               -1.3913     -0.6467      2.4855
H               -1.3913      1.1072      2.1292
H                0.5822     -2.4924      0.7043
H               -0.8604     -3.4740      0.3061
H               -0.8604     -2.4329      1.7619
31
M23
C               -1.0785     -1.3656     -0.0975
C               -1.2364     -0.1633      0.3920
C               -0.5157     -2.5215      0.7337
Si               1.8157      0.5805     -0.3139
C               -1.8528      0.9715     -0.3320
O               -2.1008      2.0211      0.2601
C               -2.1723      0.7848     -1.7790
H               -1.2536      0.4988     -2.3451
H               -2.5802      1.7292     -2.2118
H               -2.9344     -0.0215     -1.8947
C               -0.9594      0.1428      1.8663
H               -1.3301     -1.6358     -1.1334
C                1.8990     -1.2043      0.2275
C                0.7059      0.8925     -1.7825
C                1.5819      1.7660      1.1094
Cl               4.0152      1.0756     -1.1038
H                2.5614      2.0808      1.4873
H                1.0236      1.2689      1.9109
H                1.0236      2.6442      0.7654
H                1.3197      1.0811     -2.6707
H                0.0733      1.7650     -1.5835
H                0.0733      0.0143     -1.9554
H                2.9475     -1.5094      0.3201
H                1.3991     -1.8354     -0.5162
H                1.3991     -1.3158      1.1965
H                0.1229      0.1778      2.0351
H               -1.4015     -0.6414      2.4915
H               -1.4015      1.1110      2.1277
H                0.5796     -2.4890      0.7103
H               -0.8619     -3.4740      0.3164
H               -0.8619     -2.4291      1.7695
31
M24
C               -1.0840     -1.3670     -0.0925
C               -1.2511     -0.1669      0.3956
C               -0.5183     -2.5198      0.7411
Si               1.8443      0.5877     -0.3249
C               -1.8605      0.9682     -0.3335
O               -2.1018      2.0237      0.2529
C               -2.1793      0.7768     -1.7802
H               -1.2583      0.4935     -2.3443
H               -2.5910      1.7184     -2.2158
H               -2.9374     -0.0336     -1.8948
C               -0.9708      0.1454      1.8679
H               -1.3299     -1.6400     -1.1293
C                1.9034     -1.2050      0.1934
C                0.7023      0.9189     -1.7643
C                1.6109      1.7468      1.1199
Cl               4.0061      1.0741     -1.1232
H                2.5904      2.0544      1.5034
H                1.0526      1.2352      1.9123
H                1.0526      2.6312      0.7923
H                2.9478     -1.5243      0.2857
H                1.3986     -1.8200     -0.5603
H                1.3986     -1.3229      1.1590
H                1.2962      1.1254     -2.6619
H                0.0701      1.7849     -1.5373
H                0.0701      0.0407     -1.9387
H                0.1120      0.1807      2.0342
H               -1.4118     -0.6358      2.4975
H               -1.4118      1.1150      2.1261
H                0.5769     -2.4855      0.7163
H               -0.8634     -3.4740      0.3268
H               -0.8634     -2.4252      1.7771
31
M25
C               -1.0898     -1.3685     -0.0874
C               -1.2661     -0.1706      0.3992
C               -0.5212     -2.5182      0.7485
Si               1.8725      0.5948     -0.3360
C               -1.8685      0.9649     -0.3350
O               -2.1032      2.0261      0.2458
C               -2.1865      0.7687     -1.7814
H               -1.2632      0.4881     -2.3436
H               -2.6021      1.7075     -2.2197
H               -2.9407     -0.0459     -1.8950
C               -0.9825      0.1479      1.8696
H               -1.3300     -1.6443     -1.1251
C                1.9078     -1.2050      0.1593
C                0.6996      0.9450     -1.7458
C                1.6398      1.7273      1.1300
Cl               3.9966      1.0725     -1.1426
H                2.6196      2.0276      1.5187
H                1.0817      1.2013      1.9129
H                1.0817      2.6177      0.8188
H                1.2741      1.1700     -2.6516
H                0.0682      1.8037     -1.4909
H                0.0682      0.0667     -1.9224
H                2.9479     -1.5383      0.2510
H                1.3982     -1.8040     -0.6041
H                1.3982     -1.3292      1.1216
H                0.1006      0.1834      2.0334
H               -1.4225     -0.6304      2.5035
H               -1.4225      1.1188      2.1245
H                0.5739     -2.4822      0.7223
H               -0.8652     -3.4740      0.3370
H               -0.8652     -2.4216      1.7846
31
M26
C               -1.0957     -1.3700     -0.0822
C               -1.2812     -0.1743      0.4029
C               -0.5241     -2.5165      0.7560
Si               1.9006      0.6020     -0.3469
C               -1.8766      0.9615     -0.3364
O               -2.1046      2.0286      0.2387
C               -2.1938      0.7606     -1.7826
H               -1.2683      0.4827     -2.3428
H               -2.6133      1.6967     -2.2236
H               -2.9441     -0.0581     -1.8951
C               -0.9943      0.1505      1.8712
H               -1.3302     -1.6486     -1.1209
C                1.9123     -1.2043      0.1251
C                0.6980      0.9704     -1.7266
C                1.6686      1.7077      1.1395
Cl               3.9871      1.0709     -1.1619
H                2.6485      2.0007      1.5333
H                1.1105      1.1677      1.9129
H                1.1105      2.6037      0.8447
H                1.2530      1.2142     -2.6397
H                0.0674      1.8212     -1.4442
H                0.0674      0.0920     -1.9059
H                2.9479     -1.5515      0.2158
H                1.3979     -1.7872     -0.6476
H                1.3979     -1.3347      1.0840
H                0.0892      0.1862      2.0325
H               -1.4333     -0.6249      2.5094
H               -1.4333      1.1227      2.1229
H                0.5709     -2.4786      0.7283
H               -0.8670     -3.4740      0.3475
H               -0.8670     -2.4177      1.7923
31
M27
C               -1.1020     -1.3713     -0.0770
C               -1.2966     -0.1780      0.4065
C               -0.5274     -2.5148      0.7635
Si               1.9284      0.6092     -0.3579
C               -1.8851      0.9583     -0.3379
O               -2.1063      2.0311      0.2316
C               -2.2014      0.7525     -1.7837
H               -1.2737      0.4774     -2.3420
H               -2.6249      1.6859     -2.2275
H               -2.9479     -0.0702     -1.8952
C               -1.0063      0.1530      1.8728
H               -1.3308     -1.6529     -1.1166
C                1.9166     -1.2030      0.0911
C                0.6972      0.9955     -1.7072
C                1.6971      1.6880      1.1483
Cl               3.9773      1.0695     -1.1811
H                2.6772      1.9736      1.5471
H                1.1392      1.1343      1.9120
H                1.1392      2.5893      0.8699
H                1.2331      1.2586     -2.6263
H                0.0679      1.8376     -1.3974
H                0.0679      0.1170     -1.8900
H                2.9476     -1.5639      0.1805
H                1.3977     -1.7696     -0.6904
H                1.3977     -1.3392      1.0468
H                0.0775      0.1888      2.0316
H               -1.4443     -0.6194      2.5153
H               -1.4443      1.1265      2.1212
H                0.5675     -2.4751      0.7343
H               -0.8691     -3.4739      0.3578
H               -0.8691     -2.4138      1.7999
31
M28
C               -1.1083     -1.3728     -0.0718
C               -1.3121     -0.1817      0.4103
C               -0.5308     -2.5131      0.7709
Si               1.9562      0.6164     -0.3687
C               -1.8936      0.9549     -0.3392
O               -2.1082      2.0336      0.2246
C               -2.2092      0.7444     -1.7848
H               -1.2791      0.4720     -2.3410
H               -2.6365      1.6751     -2.2312
H               -2.9517     -0.0825     -1.8951
C               -1.0186      0.1555      1.8745
H               -1.3314     -1.6572     -1.1123
C                1.9211     -1.2010      0.0572
C                0.6975      1.0200     -1.6873
C                1.7256      1.6681      1.1565
Cl               3.9673      1.0679     -1.2003
H                2.5314      1.4593      1.8695
H                0.7595      1.4348      1.6185
H                1.7505      2.7276      0.8770
H                0.9188      0.4428     -2.5924
H                0.7399      2.0907     -1.9173
H               -0.3049      0.7632     -1.3262
H                2.6680     -1.4092      0.8318
H                2.1491     -1.7905     -0.8382
H                0.9254     -1.4702      0.4280
H                0.0655      0.1916      2.0309
H               -1.4557     -0.6138      2.5213
H               -1.4557      1.1303      2.1196
H                0.5640     -2.4717      0.7404
H               -0.8715     -3.4738      0.3682
H               -0.8715     -2.4100      1.8075
31
M29
C               -1.1149     -1.3742     -0.0665
C               -1.3279     -0.1853      0.4141
C               -0.5346     -2.5114      0.7785
Si               1.9836      0.6236     -0.3796
C               -1.9024      0.9517     -0.3405
O               -2.1103      2.0361      0.2176
C               -2.2172      0.7364     -1.7858
H               -1.2849      0.4667     -2.3401
H               -2.6484      1.6643     -2.2350
H               -2.9558     -0.0946     -1.8951
C               -1.0311      0.1581      1.8762
H               -1.3323     -1.6614     -1.1079
C                1.9254     -1.1985      0.0235
C                0.6988      1.0439     -1.6673
C                1.7538      1.6481      1.1642
Cl               3.9571      1.0664     -1.2195
H                0.8945      0.4693     -2.5798
H                0.7449      2.1153     -1.8933
H               -0.2974      0.7938     -1.2847
H                2.5529      1.4175      1.8780
H                0.7825      1.4159      1.6156
H                1.7913      2.7124      0.9052
H                2.6842     -1.4297      0.7798
H                2.1249     -1.7799     -0.8839
H                0.9330     -1.4554      0.4112
H                0.0535      0.1942      2.0301
H               -1.4671     -0.6083      2.5273
H               -1.4671      1.1341      2.1180
H                0.5601     -2.4683      0.7465
H               -0.8742     -3.4737      0.3787
H               -0.8742     -2.4061      1.8152
