30
1
H               -0.1160      1.8493     -1.3050
C                0.1328      1.7972     -0.2592
C               -0.2181      0.7649      0.5014
C                0.8457      3.0262      0.3111
Si              -1.2089     -0.7083     -0.1203
C                0.1060      0.8387      1.9958
C               -0.1189     -2.2143      0.0517
C               -1.5336     -0.4619     -1.9423
C               -2.7743     -0.9719      0.8624
C                2.5519     -0.6951      0.1154
O                2.6541     -0.6377      1.2192
C                2.4745     -0.7995     -1.3279
H                1.7247     -1.5433     -1.5839
H                3.4460     -1.0998     -1.7120
H                2.1865      0.1669     -1.7282
H                0.7890     -2.0785     -0.5472
H               -0.6603     -3.0994     -0.3012
H                0.1547     -2.3489      1.1044
H               -2.5201     -1.1521      1.9131
H               -3.3146     -1.8381      0.4635
H               -3.4073     -0.0803      0.7873
H               -0.5795     -0.3955     -2.4777
H               -2.1008      0.4641     -2.0904
H               -2.1109     -1.3097     -2.3285
H                1.1932      0.8455      2.1340
H               -0.3216     -0.0321      2.5058
H               -0.3216      1.7554      2.4176
H                1.9302      2.8830      0.2447
H                0.5585      3.1610      1.3602
H                0.5585      3.9144     -0.2632
30
M1
H               -0.1035      1.8351     -1.3126
C                0.1415      1.7884     -0.2657
C               -0.2167      0.7622      0.4999
C                0.8570      3.0180      0.3003
Si              -1.2118     -0.7106     -0.1164
C                0.1026      0.8434      1.9950
C               -0.1267     -2.2192      0.0638
C               -1.5321     -0.4708     -1.9400
C               -2.7798     -0.9636      0.8648
C                2.5471     -0.6904      0.1145
O                2.6465     -0.6409      1.2190
C                2.4761     -0.7869     -1.3298
H                1.6883     -1.4872     -1.5940
H                3.4325     -1.1406     -1.7060
H                2.2464      0.1945     -1.7312
H                0.7822     -2.0890     -0.5346
H               -0.6706     -3.1042     -0.2857
H                0.1452     -2.3499      1.1175
H               -2.5281     -1.1395      1.9169
H               -3.3225     -1.8298      0.4693
H               -3.4094     -0.0701      0.7843
H               -0.5768     -0.4102     -2.4739
H               -2.0957      0.4566     -2.0931
H               -2.1119     -1.3182     -2.3236
H                1.9412      2.8728      0.2334
H                0.5709      3.1565      1.3492
H                0.5709      3.9049     -0.2766
H                1.1894      0.8510      2.1366
H               -0.3265     -0.0250      2.5079
H               -0.3265      1.7621      2.4109
30
M2
H               -0.0893      1.8189     -1.3213
C                0.1499      1.7793     -0.2728
C               -0.2163      0.7603      0.4988
C                0.8663      3.0108      0.2877
Si              -1.2132     -0.7139     -0.1116
C                0.0960      0.8514      1.9948
C               -0.1335     -2.2242      0.0848
C               -1.5213     -0.4857     -1.9389
C               -2.7883     -0.9538      0.8616
C                2.5405     -0.6862      0.1134
O                2.6368     -0.6457      1.2186
C                2.4763     -0.7735     -1.3319
H                1.6499     -1.4235     -1.6056
H                3.4127     -1.1841     -1.7006
H                2.3112      0.2210     -1.7328
H               -2.5438     -1.1223      1.9166
H               -3.3315     -1.8213      0.4695
H               -3.4143     -0.0589      0.7701
H                0.7787     -2.1011     -0.5101
H               -0.6783     -3.1102     -0.2607
H                0.1329     -2.3480      1.1407
H               -0.5625     -0.4324     -2.4671
H               -2.0804      0.4428     -2.1019
H               -2.1019     -1.3335     -2.3201
H                1.1821      0.8603      2.1415
H               -0.3353     -0.0137      2.5113
H               -0.3353      1.7727      2.4026
H                1.9505      2.8646      0.2211
H                0.5806      3.1540      1.3361
H                0.5806      3.8954     -0.2929
30
M3
H               -0.0737      1.8020     -1.3301
C                0.1576      1.7709     -0.2796
C               -0.2172      0.7597      0.4981
C                0.8726      3.0055      0.2759
Si              -1.2125     -0.7178     -0.1070
C                0.0847      0.8624      1.9955
C               -0.1388     -2.2290      0.1153
C               -1.4984     -0.5065     -1.9398
C               -2.7997     -0.9429      0.8500
C                2.5319     -0.6827      0.1118
O                2.6250     -0.6510      1.2174
C                2.4745     -0.7607     -1.3345
H                1.6120     -1.3570     -1.6180
H                3.3867     -1.2280     -1.6965
H                2.3759      0.2431     -1.7342
H               -2.5682     -1.1006      1.9096
H               -3.3408     -1.8129      0.4608
H               -3.4219     -0.0471      0.7414
H                0.7794     -2.1143     -0.4720
H               -0.6826     -3.1170     -0.2265
H                0.1171     -2.3427      1.1750
H               -0.5333     -0.4619     -2.4573
H               -2.0520      0.4224     -2.1185
H               -2.0776     -1.3559     -2.3195
H                1.1697      0.8730      2.1495
H               -0.3498      0.0011      2.5157
H               -0.3498      1.7867      2.3932
H                1.9569      2.8600      0.2104
H                0.5864      3.1529      1.3235
H                0.5864      3.8873     -0.3086
30
M4
H               -0.0572      1.7859     -1.3379
C                0.1647      1.7636     -0.2851
C               -0.2189      0.7600      0.4982
C                0.8761      3.0022      0.2661
Si              -1.2098     -0.7223     -0.1028
C                0.0706      0.8749      1.9971
C               -0.1431     -2.2331      0.1527
C               -1.4646     -0.5313     -1.9424
C               -2.8135     -0.9307      0.8301
C                2.5208     -0.6796      0.1096
O                2.6113     -0.6557      1.2157
C                2.4698     -0.7497     -1.3375
H                1.5765     -1.2937     -1.6300
H                3.3562     -1.2683     -1.6938
H                2.4338      0.2591     -1.7353
H               -2.6004     -1.0752      1.8954
H               -3.3504     -1.8043      0.4431
H               -3.4313     -0.0348      0.6994
H                0.7835     -2.1278     -0.4231
H               -0.6843     -3.1240     -0.1858
H                0.0978     -2.3344      1.2171
H               -0.4910     -0.4962     -2.4444
H               -2.0118      0.3974     -2.1410
H               -2.0408     -1.3830     -2.3218
H                1.9609      2.8590      0.2024
H                0.5884      3.1532      1.3128
H                0.5884      3.8809     -0.3223
H                1.1544      0.8874      2.1599
H               -0.3676      0.0175      2.5206
H               -0.3676      1.8020      2.3839
30
M5
H               -0.0399      1.7717     -1.3442
C                0.1718      1.7577     -0.2891
C               -0.2204      0.7609      0.4986
C                0.8786      3.0002      0.2591
Si              -1.2053     -0.7266     -0.0996
C                0.0556      0.8871      1.9992
C               -0.1463     -2.2362      0.1922
C               -1.4253     -0.5573     -1.9458
C               -2.8270     -0.9191      0.8054
C                2.5062     -0.6758      0.1070
O                2.5945     -0.6581      1.2134
C                2.4611     -0.7400     -1.3408
H                1.5434     -1.2364     -1.6412
H                3.3222     -1.3028     -1.6921
H                2.4807      0.2700     -1.7370
H               -2.6344     -1.0499      1.8764
H               -3.3585     -1.7966      0.4200
H               -3.4400     -0.0237      0.6511
H                0.7896     -2.1402     -0.3699
H               -0.6841     -3.1302     -0.1437
H                0.0772     -2.3246      1.2615
H               -0.4424     -0.5315     -2.4300
H               -1.9654      0.3707     -2.1658
H               -1.9972     -1.4116     -2.3255
H                1.1378      0.9016      2.1716
H               -0.3868      0.0333      2.5251
H               -0.3868      1.8167      2.3751
H                1.9639      2.8602      0.1974
H                0.5890      3.1536      1.3050
H                0.5890      3.8762     -0.3324
30
M6
H               -0.0220      1.7596     -1.3488
C                0.1795      1.7526     -0.2917
C               -0.2210      0.7616      0.4992
C                0.8817      2.9984      0.2550
Si              -1.1997     -0.7307     -0.0973
C                0.0415      0.8977      2.0014
C               -0.1489     -2.2390      0.2290
C               -1.3849     -0.5814     -1.9491
C               -2.8386     -0.9082      0.7791
C                2.4880     -0.6707      0.1043
O                2.5751     -0.6578      1.2109
C                2.4480     -0.7313     -1.3439
H                1.5123     -1.1878     -1.6509
H                3.2867     -1.3295     -1.6909
H                2.5134      0.2773     -1.7391
H               -2.6666     -1.0259      1.8551
H               -3.3649     -1.7894      0.3947
H               -3.4464     -0.0135      0.6020
H                0.7961     -2.1515     -0.3192
H               -0.6833     -3.1357     -0.1050
H                0.0573     -2.3153      1.3027
H               -0.3931     -0.5641     -2.4152
H               -1.9178      0.3456     -2.1895
H               -1.9525     -1.4383     -2.3297
H                1.1222      0.9142      2.1834
H               -0.4048      0.0469      2.5288
H               -0.4048      1.8294      2.3674
H                1.9675      2.8616      0.1950
H                0.5902      3.1531      1.3001
H                0.5902      3.8722     -0.3388
30
M7
H               -0.0047      1.7502     -1.3519
C                0.1882      1.7482     -0.2931
C               -0.2200      0.7616      0.4996
C                0.8868      2.9962      0.2532
Si              -1.1941     -0.7343     -0.0958
C                0.0315      0.9050      2.0030
C               -0.1508     -2.2414      0.2590
C               -1.3501     -0.6014     -1.9515
C               -2.8470     -0.8994      0.7565
C                2.4669     -0.6641      0.1020
O                2.5540     -0.6548      1.2088
C                2.4311     -0.7229     -1.3466
H                1.4825     -1.1476     -1.6588
H                3.2511     -1.3486     -1.6896
H                2.5326      0.2830     -1.7412
H               -2.6922     -1.0064      1.8362
H               -3.3692     -1.7834      0.3729
H               -3.4499     -0.0053      0.5607
H                0.8016     -2.1609     -0.2773
H               -0.6825     -3.1403     -0.0735
H                0.0409     -2.3077      1.3361
H               -0.3512     -0.5911     -2.4023
H               -1.8765      0.3250     -2.2085
H               -1.9143     -1.4600     -2.3331
H                1.1108      0.9230      2.1927
H               -0.4181      0.0564      2.5311
H               -0.4181      1.8380      2.3613
H                1.9730      2.8621      0.1945
H                0.5938      3.1512      1.2978
H                0.5938      3.8688     -0.3417
30
M8
H                0.0121      1.7424     -1.3541
C                0.1976      1.7440     -0.2940
C               -0.2174      0.7609      0.4996
C                0.8936      2.9932      0.2528
Si              -1.1886     -0.7375     -0.0952
C                0.0245      0.9098      2.0040
C               -0.1514     -2.2436      0.2810
C               -1.3224     -0.6167     -1.9535
C               -2.8517     -0.8921      0.7391
C                2.4440     -0.6563      0.1001
O                2.5324     -0.6500      1.2069
C                2.4117     -0.7146     -1.3488
H                1.4540     -1.1145     -1.6652
H                3.2167     -1.3617     -1.6881
H                2.5417      0.2878     -1.7435
H               -2.7097     -0.9909      1.8213
H               -3.3715     -1.7778      0.3564
H               -3.4501      0.0018      0.5293
H                0.8066     -2.1685     -0.2463
H               -0.6811     -3.1441     -0.0504
H                0.0293     -2.3025      1.3604
H               -0.3181     -0.6120     -2.3925
H               -1.8432      0.3092     -2.2228
H               -1.8842     -1.4765     -2.3359
H                1.1026      0.9292      2.2005
H               -0.4280      0.0628      2.5324
H               -0.4280      1.8439      2.3561
H                1.9800      2.8610      0.1950
H                0.5995      3.1476      1.2973
H                0.5995      3.8653     -0.3423
30
M9
H                0.0327      1.7276     -1.3628
C                0.2058      1.7394     -0.3006
C               -0.2172      0.7633      0.4975
C                0.8935      2.9948      0.2424
Si              -1.1791     -0.7437     -0.0917
C                0.0081      0.9266      2.0030
C               -0.1455     -2.2436      0.3176
C               -1.2853     -0.6458     -1.9531
C               -2.8542     -0.8885      0.7199
C                2.4206     -0.6486      0.0980
O                2.5113     -0.6451      1.2046
C                2.3911     -0.7072     -1.3512
H                1.4268     -1.0872     -1.6712
H                3.1837     -1.3710     -1.6872
H                2.5437      0.2920     -1.7462
H               -2.7281     -0.9731      1.8054
H               -3.3679     -1.7796      0.3413
H               -3.4500      0.0021      0.4897
H                0.8194     -2.1740     -0.1974
H               -0.6697     -3.1489     -0.0095
H                0.0205     -2.2886      1.4000
H               -0.2747     -0.6458     -2.3772
H               -1.8026      0.2765     -2.2416
H               -1.8411     -1.5105     -2.3334
H                1.0840      0.9491      2.2111
H               -0.4491      0.0841      2.5344
H               -0.4491      1.8634      2.3414
H                1.9808      2.8683      0.1877
H                0.5961      3.1521      1.2855
H                0.5961      3.8626     -0.3572
30
M10
H                0.0420      1.7323     -1.3569
C                0.2175      1.7368     -0.2951
C               -0.2083      0.7578      0.4981
C                0.9120      2.9857      0.2543
Si              -1.1791     -0.7426     -0.0951
C                0.0218      0.9114      2.0039
C               -0.1525     -2.2487      0.3091
C               -1.2847     -0.6377     -1.9561
C               -2.8546     -0.8795      0.7170
C                2.3951     -0.6377      0.0978
O                2.4891     -0.6369      1.2044
C                2.3681     -0.6972     -1.3517
H                1.3988     -1.0603     -1.6749
H                3.1500     -1.3754     -1.6842
H                2.5403      0.2984     -1.7472
H               -2.7286     -0.9676      1.8022
H               -3.3737     -1.7666      0.3364
H               -3.4452      0.0152      0.4892
H                0.8124     -2.1823     -0.2066
H               -0.6813     -3.1505     -0.0202
H                0.0143     -2.2976      1.3912
H               -0.2741     -0.6418     -2.3802
H               -1.7967      0.2885     -2.2413
H               -1.8453     -1.4980     -2.3394
H                1.0983      0.9323      2.2086
H               -0.4341      0.0657      2.5313
H               -0.4341      1.8462      2.3496
H                1.9986      2.8546      0.1967
H                0.6172      3.1378      1.2989
H                0.6172      3.8586     -0.3393
30
M11
H                0.0549      1.7296     -1.3580
C                0.2275      1.7336     -0.2957
C               -0.2022      0.7553      0.4965
C                0.9226      2.9813      0.2558
Si              -1.1751     -0.7448     -0.0955
C                0.0252      0.9089      2.0027
C               -0.1531     -2.2518      0.3171
C               -1.2731     -0.6450     -1.9573
C               -2.8540     -0.8730      0.7111
C                2.3699     -0.6274      0.0973
O                2.4680     -0.6295      1.2036
C                2.3451     -0.6883     -1.3525
H                1.3717     -1.0368     -1.6788
H                3.1176     -1.3787     -1.6817
H                2.5343      0.3040     -1.7488
H               -2.7321     -0.9573      1.7970
H               -3.3747     -1.7597      0.3319
H               -3.4407      0.0229      0.4778
H                0.8136     -2.1892     -0.1955
H               -0.6828     -3.1535     -0.0110
H                0.0098     -2.2975      1.3999
H               -0.2608     -0.6532     -2.3774
H               -1.7815      0.2816     -2.2472
H               -1.8345     -1.5049     -2.3402
H                1.1013      0.9300      2.2095
H               -0.4315      0.0631      2.5293
H               -0.4315      1.8437      2.3476
H                2.0091      2.8500      0.1978
H                0.6280      3.1317      1.3008
H                0.6280      3.8553     -0.3362
30
M12
H                0.0668      1.7280     -1.3588
C                0.2375      1.7307     -0.2963
C               -0.1949      0.7522      0.4943
C                0.9334      2.9766      0.2580
Si              -1.1715     -0.7468     -0.0963
C                0.0313      0.9047      2.0008
C               -0.1545     -2.2553      0.3232
C               -1.2643     -0.6512     -1.9586
C               -2.8524     -0.8654      0.7074
C                2.3445     -0.6167      0.0968
O                2.4476     -0.6218      1.2030
C                2.3220     -0.6792     -1.3532
H                1.3455     -1.0151     -1.6825
H                3.0861     -1.3806     -1.6788
H                2.5263      0.3095     -1.7504
H               -2.7330     -0.9467      1.7938
H               -3.3762     -1.7511      0.3301
H               -3.4350      0.0322      0.4701
H                0.8136     -2.1967     -0.1871
H               -0.6858     -3.1565     -0.0035
H                0.0056     -2.2982      1.4066
H               -0.2510     -0.6637     -2.3760
H               -1.7689      0.2764     -2.2521
H               -1.8275     -1.5102     -2.3409
H                1.1072      0.9257      2.2084
H               -0.4257      0.0585      2.5263
H               -0.4257      1.8391      2.3460
H                2.0199      2.8448      0.1993
H                0.6393      3.1248      1.3033
H                0.6393      3.8523     -0.3319
30
M13
H                0.0772      1.7284     -1.3597
C                0.2474      1.7284     -0.2970
C               -0.1865      0.7486      0.4915
C                0.9448      2.9721      0.2603
Si              -1.1682     -0.7486     -0.0972
C                0.0405      0.8984      1.9981
C               -0.1573     -2.2596      0.3276
C               -1.2584     -0.6566     -1.9597
C               -2.8505     -0.8563      0.7053
C                2.3188     -0.6053      0.0967
O                2.4276     -0.6138      1.2024
C                2.2988     -0.6700     -1.3538
H                1.3199     -0.9945     -1.6863
H                3.0556     -1.3811     -1.6753
H                2.5170      0.3153     -1.7520
H               -2.7325     -0.9349      1.7921
H               -3.3782     -1.7406      0.3303
H               -3.4283      0.0434      0.4646
H                0.8119     -2.2058     -0.1814
H               -0.6912     -3.1598      0.0023
H                0.0011     -2.3004      1.4114
H               -0.2446     -0.6737     -2.3759
H               -1.7592      0.2722     -2.2558
H               -1.8243     -1.5144     -2.3409
H                1.1166      0.9190      2.2052
H               -0.4162      0.0512      2.5224
H               -0.4162      1.8322      2.3453
H                2.0311      2.8394      0.2008
H                0.6513      3.1178      1.3062
H                0.6513      3.8496     -0.3271
30
M14
H                0.0865      1.7295     -1.3605
C                0.2570      1.7262     -0.2980
C               -0.1769      0.7441      0.4879
C                0.9558      2.9675      0.2630
Si              -1.1652     -0.7507     -0.0985
C                0.0522      0.8904      1.9946
C               -0.1611     -2.2648      0.3315
C               -1.2538     -0.6620     -1.9613
C               -2.8481     -0.8447      0.7045
C                2.2930     -0.5937      0.0965
O                2.4085     -0.6062      1.2019
C                2.2757     -0.6610     -1.3543
H                1.2952     -0.9752     -1.6904
H                3.0259     -1.3813     -1.6714
H                2.5069      0.3208     -1.7536
H               -2.7305     -0.9202      1.7915
H               -3.3816     -1.7269      0.3326
H               -3.4201      0.0579      0.4607
H                0.8089     -2.2163     -0.1765
H               -0.6984     -3.1635      0.0080
H               -0.0042     -2.3033      1.4156
H               -0.2398     -0.6843     -2.3767
H               -1.7503      0.2684     -2.2595
H               -1.8231     -1.5180     -2.3411
H                1.1285      0.9103      2.2002
H               -0.4040      0.0421      2.5176
H               -0.4040      1.8235      2.3446
H                2.0419      2.8340      0.2027
H                0.6628      3.1101      1.3095
H                0.6628      3.8472     -0.3214
30
M15
H                0.0942      1.7321     -1.3612
C                0.2663      1.7246     -0.2989
C               -0.1659      0.7390      0.4840
C                0.9662      2.9634      0.2661
Si              -1.1624     -0.7526     -0.0999
C                0.0671      0.8804      1.9905
C               -0.1671     -2.2711      0.3351
C               -1.2507     -0.6669     -1.9628
C               -2.8455     -0.8308      0.7043
C                2.2668     -0.5815      0.0966
O                2.3900     -0.5985      1.2015
C                2.2533     -0.6520     -1.3547
H                1.2717     -0.9568     -1.6952
H                2.9975     -1.3807     -1.6663
H                2.4971      0.3261     -1.7553
H               -2.7279     -0.9032      1.7916
H               -3.3859     -1.7103      0.3359
H               -3.4108      0.0752      0.4575
H                0.8036     -2.2294     -0.1721
H               -0.7092     -3.1677      0.0133
H               -0.0116     -2.3078      1.4194
H               -0.2369     -0.6952     -2.3783
H               -1.7426      0.2655     -2.2627
H               -1.8245     -1.5207     -2.3410
H                1.1439      0.8995      2.1935
H               -0.3880      0.0306      2.5120
H               -0.3880      1.8125      2.3446
H                2.0522      2.8293      0.2050
H                0.6736      3.1026      1.3132
H                0.6736      3.8453     -0.3152
30
M16
H                0.1008      1.7353     -1.3618
C                0.2752      1.7232     -0.3001
C               -0.1533      0.7329      0.4794
C                0.9753      2.9598      0.2695
Si              -1.1595     -0.7546     -0.1014
C                0.0845      0.8689      1.9856
C               -0.1751     -2.2790      0.3380
C               -1.2489     -0.6719     -1.9645
C               -2.8422     -0.8139      0.7052
C                2.2404     -0.5689      0.0969
O                2.3729     -0.5914      1.2010
C                2.2319     -0.6435     -1.3550
H                1.2501     -0.9399     -1.7009
H                2.9711     -1.3803     -1.6597
H                2.4879      0.3307     -1.7571
H               -2.7238     -0.8829      1.7926
H               -3.3912     -1.6899      0.3412
H               -3.3994      0.0962      0.4553
H                0.7962     -2.2452     -0.1686
H               -0.7232     -3.1726      0.0181
H               -0.0206     -2.3140      1.4225
H               -0.2357     -0.7068     -2.3808
H               -1.7356      0.2628     -2.2657
H               -1.8280     -1.5230     -2.3406
H                1.1621      0.8869      2.1852
H               -0.3691      0.0174      2.5055
H               -0.3691      1.7999      2.3445
H                2.0613      2.8257      0.2077
H                0.6829      3.0952      1.3170
H                0.6829      3.8439     -0.3086
30
M17
H                0.1065      1.7385     -1.3627
C                0.2837      1.7215     -0.3014
C               -0.1389      0.7253      0.4744
C                0.9824      2.9570      0.2726
Si              -1.1565     -0.7573     -0.1031
C                0.1042      0.8559      1.9803
C               -0.1852     -2.2888      0.3406
C               -1.2478     -0.6764     -1.9661
C               -2.8382     -0.7938      0.7069
C                2.2135     -0.5561      0.0971
O                2.3573     -0.5855      1.2002
C                2.2120     -0.6361     -1.3552
H                1.2310     -0.9254     -1.7080
H                2.9474     -1.3803     -1.6510
H                2.4801      0.3340     -1.7594
H               -2.7186     -0.8588      1.7944
H               -3.3977     -1.6653      0.3482
H               -3.3857      0.1213      0.4536
H                0.7867     -2.2644     -0.1655
H               -0.7405     -3.1785      0.0225
H               -0.0315     -2.3225      1.4252
H               -0.2354     -0.7187     -2.3837
H               -1.7287      0.2611     -2.2679
H               -1.8331     -1.5241     -2.3403
H                1.1824      0.8729      2.1762
H               -0.3479      0.0026      2.4987
H               -0.3479      1.7857      2.3441
H                2.0686      2.8241      0.2108
H                0.6894      3.0886      1.3205
H                0.6894      3.8427     -0.3027
30
M18
H                0.1119      1.7412     -1.3635
C                0.2918      1.7199     -0.3028
C               -0.1224      0.7165      0.4691
C                0.9863      2.9554      0.2759
Si              -1.1528     -0.7602     -0.1049
C                0.1254      0.8422      1.9747
C               -0.1975     -2.3006      0.3426
C               -1.2474     -0.6804     -1.9678
C               -2.8328     -0.7705      0.7095
C                2.1862     -0.5427      0.0975
O                2.3441     -0.5809      1.1991
C                2.1944     -0.6297     -1.3554
H                1.2154     -0.9130     -1.7173
H                2.9271     -1.3813     -1.6393
H                2.4750      0.3357     -1.7617
H                0.7748     -2.2872     -0.1629
H               -0.7617     -3.1853      0.0261
H               -0.0448     -2.3335      1.4274
H               -2.7113     -0.8312      1.7970
H               -3.4044     -1.6366      0.3568
H               -3.3690      0.1503      0.4527
H               -0.2361     -0.7306     -2.3874
H               -1.7218      0.2603     -2.2696
H               -1.8396     -1.5242     -2.3400
H                1.2042      0.8583      2.1673
H               -0.3253     -0.0126      2.4918
H               -0.3253      1.7710      2.3428
H                2.0729      2.8257      0.2152
H                0.6916      3.0829      1.3238
H                0.6916      3.8421     -0.2970
30
M19
H                0.1177      1.7425     -1.3646
C                0.2996      1.7176     -0.3045
C               -0.1038      0.7059      0.4636
C                0.9866      2.9551      0.2790
Si              -1.1485     -0.7641     -0.1069
C                0.1470      0.8282      1.9690
C               -0.2117     -2.3148      0.3442
C               -1.2468     -0.6840     -1.9696
C               -2.8258     -0.7440      0.7128
C                2.1587     -0.5294      0.0980
O                2.3336     -0.5783      1.1974
C                2.1795     -0.6252     -1.3554
H                1.2040     -0.9043     -1.7284
H                2.9111     -1.3834     -1.6243
H                2.4727      0.3352     -1.7644
H               -2.7016     -0.8000      1.8003
H               -3.4116     -1.6035      0.3673
H               -3.3487      0.1832      0.4521
H                0.7611     -2.3139     -0.1608
H               -0.7861     -3.1934      0.0290
H               -0.0600     -2.3474      1.4291
H               -0.2370     -0.7424     -2.3916
H               -1.7144      0.2605     -2.2705
H               -1.8468     -1.5230     -2.3402
H                1.2262      0.8437      2.1595
H               -0.3029     -0.0277      2.4850
H               -0.3029      1.7562      2.3400
H                2.0740      2.8310      0.2205
H                0.6888      3.0784      1.3266
H                0.6888      3.8418     -0.2922
30
M20
H                0.1243      1.7420     -1.3663
C                0.3070      1.7148     -0.3063
C               -0.0833      0.6938      0.4579
C                0.9824      2.9564      0.2821
Si              -1.1435     -0.7687     -0.1090
C                0.1685      0.8145      1.9632
C               -0.2272     -2.3307      0.3451
C               -1.2465     -0.6869     -1.9714
C               -2.8170     -0.7158      0.7170
C                2.1310     -0.5162      0.0985
O                2.3262     -0.5780      1.1951
C                2.1677     -0.6227     -1.3552
H                1.1971     -0.8989     -1.7413
H                2.8993     -1.3869     -1.6065
H                2.4734      0.3325     -1.7670
H               -2.6894     -0.7670      1.8044
H               -3.4182     -1.5676      0.3792
H               -3.3256      0.2183      0.4524
H                0.7457     -2.3433     -0.1594
H               -0.8129     -3.2022      0.0311
H               -0.0764     -2.3635      1.4302
H               -0.2385     -0.7539     -2.3963
H               -1.7068      0.2617     -2.2705
H               -1.8548     -1.5205     -2.3406
H                1.2479      0.8297      2.1530
H               -0.2810     -0.0419      2.4786
H               -0.2810      1.7421      2.3356
H                2.0709      2.8408      0.2273
H                0.6799      3.0754      1.3288
H                0.6799      3.8419     -0.2886
30
M21
H                0.1324      1.7396     -1.3686
C                0.3141      1.7116     -0.3085
C               -0.0610      0.6806      0.4520
C                0.9739      2.9591      0.2850
Si              -1.1374     -0.7740     -0.1114
C                0.1887      0.8017      1.9576
C               -0.2432     -2.3480      0.3454
C               -1.2460     -0.6891     -1.9733
C               -2.8058     -0.6860      0.7218
C                2.1036     -0.5033      0.0990
O                2.3218     -0.5795      1.1917
C                2.1592     -0.6219     -1.3550
H                1.1947     -0.8968     -1.7558
H                2.8919     -1.3913     -1.5864
H                2.4773      0.3280     -1.7695
H               -2.6742     -0.7322      1.8089
H               -3.4236     -1.5292      0.3924
H               -3.2991      0.2552      0.4533
H                0.7296     -2.3749     -0.1585
H               -0.8409     -3.2117      0.0324
H               -0.0935     -2.3813      1.4307
H               -0.2400     -0.7645     -2.4017
H               -1.6989      0.2639     -2.2698
H               -1.8628     -1.5169     -2.3414
H                1.2678      0.8170      2.1489
H               -0.2614     -0.0547      2.4726
H               -0.2614      1.7293      2.3291
H                2.0638      2.8546      0.2353
H                0.6652      3.0734      1.3304
H                0.6652      3.8423     -0.2858
30
M22
H                0.1421      1.7353     -1.3714
C                0.3210      1.7078     -0.3109
C               -0.0371      0.6661      0.4460
C                0.9608      2.9632      0.2878
Si              -1.1306     -0.7802     -0.1140
C                0.2075      0.7896      1.9523
C               -0.2592     -2.3662      0.3453
C               -1.2449     -0.6909     -1.9754
C               -2.7928     -0.6559      0.7269
C                2.0768     -0.4912      0.0994
O                2.3201     -0.5831      1.1875
C                2.1536     -0.6231     -1.3545
H                1.1961     -0.8976     -1.7708
H                2.8878     -1.3967     -1.5650
H                2.4836      0.3216     -1.7713
H               -2.6565     -0.6975      1.8136
H               -3.4278     -1.4896      0.4061
H               -3.2700      0.2925      0.4546
H                0.7134     -2.4077     -0.1583
H               -0.8690     -3.2217      0.0332
H               -0.1103     -2.4002      1.4306
H               -0.2412     -0.7748     -2.4075
H               -1.6900      0.2668     -2.2686
H               -1.8706     -1.5122     -2.3428
H                1.2859      0.8056      2.1472
H               -0.2442     -0.0660      2.4671
H               -0.2442      1.7177      2.3208
H                2.0523      2.8730      0.2448
H                0.6441      3.0725      1.3314
H                0.6441      3.8429     -0.2841
30
M23
H                0.1537      1.7294     -1.3750
C                0.3275      1.7036     -0.3136
C               -0.0118      0.6507      0.4400
C                0.9433      2.9683      0.2907
Si              -1.1232     -0.7869     -0.1168
C                0.2248      0.7789      1.9472
C               -0.2749     -2.3847      0.3450
C               -1.2434     -0.6923     -1.9776
C               -2.7782     -0.6260      0.7322
C                2.0507     -0.4799      0.0999
O                2.3204     -0.5880      1.1824
C                2.1505     -0.6257     -1.3538
H                1.2006     -0.9007     -1.7860
H                2.8867     -1.4026     -1.5432
H                2.4917      0.3142     -1.7724
H               -2.6368     -0.6634      1.8183
H               -3.4305     -1.4496      0.4201
H               -3.2389      0.3295      0.4564
H                0.6971     -2.4409     -0.1583
H               -0.8969     -3.2317      0.0339
H               -0.1268     -2.4193      1.4304
H               -0.2421     -0.7848     -2.4135
H               -1.6803      0.2703     -2.2670
H               -1.8783     -1.5068     -2.3446
H                1.3022      0.7959      2.1477
H               -0.2292     -0.0754      2.4622
H               -0.2292      1.7079      2.3105
H                2.0363      2.8952      0.2558
H                0.6172      3.0718      1.3320
H                0.6172      3.8434     -0.2829
30
M24
H                0.1675      1.7221     -1.3791
C                0.3339      1.6990     -0.3166
C                0.0153      0.6346      0.4338
C                0.9211      2.9744      0.2936
Si              -1.1149     -0.7941     -0.1198
C                0.2403      0.7688      1.9422
C               -0.2894     -2.4030      0.3445
C               -1.2412     -0.6935     -1.9798
C               -2.7616     -0.5966      0.7376
C                2.0256     -0.4697      0.1002
O                2.3227     -0.5942      1.1766
C                2.1496     -0.6295     -1.3529
H                1.2079     -0.9056     -1.8008
H                2.8878     -1.4088     -1.5217
H                2.5012      0.3060     -1.7728
H               -2.6146     -0.6303      1.8232
H               -3.4313     -1.4095      0.4342
H               -3.2056      0.3658      0.4588
H                0.6817     -2.4738     -0.1586
H               -0.9234     -3.2416      0.0348
H               -0.1418     -2.4380      1.4300
H               -0.2425     -0.7948     -2.4198
H               -1.6696      0.2742     -2.2651
H               -1.8856     -1.5007     -2.3464
H                1.3161      0.7873      2.1509
H               -0.2170     -0.0838      2.4571
H               -0.2170      1.6989      2.2985
H                2.0155      2.9213      0.2682
H                0.5841      3.0713      1.3320
H                0.5841      3.8438     -0.2825
30
M25
H                0.1839      1.7137     -1.3841
C                0.3403      1.6942     -0.3199
C                0.0440      0.6178      0.4274
C                0.8941      2.9813      0.2969
Si              -1.1059     -0.8017     -0.1229
C                0.2544      0.7596      1.9373
C               -0.3022     -2.4209      0.3440
C               -1.2382     -0.6945     -1.9821
C               -2.7435     -0.5680      0.7427
C                2.0018     -0.4606      0.1006
O                2.3266     -0.6013      1.1702
C                2.1508     -0.6342     -1.3518
H                1.2173     -0.9118     -1.8152
H                2.8909     -1.4151     -1.5011
H                2.5120      0.2972     -1.7726
H               -2.5909     -0.5983      1.8276
H               -3.4303     -1.3696      0.4479
H               -3.1707      0.4012      0.4609
H                0.6676     -2.5059     -0.1595
H               -0.9477     -3.2514      0.0361
H               -0.1546     -2.4559      1.4294
H               -0.2423     -0.8049     -2.4262
H               -1.6576      0.2783     -2.2630
H               -1.8923     -1.4939     -2.3485
H                1.3281      0.7801      2.1562
H               -0.2072     -0.0909      2.4519
H               -0.2072      1.6910      2.2846
H                1.9896      2.9514      0.2826
H                0.5446      3.0704      1.3319
H                0.5446      3.8437     -0.2822
30
M26
H                0.2034      1.7041     -1.3893
C                0.3467      1.6890     -0.3233
C                0.0745      0.6005      0.4211
C                0.8618      2.9890      0.3001
Si              -1.0962     -0.8096     -0.1261
C                0.2669      0.7511      1.9325
C               -0.3132     -2.4380      0.3439
C               -1.2341     -0.6956     -1.9845
C               -2.7239     -0.5407      0.7479
C                1.9794     -0.4528      0.1010
O                2.3318     -0.6092      1.1634
C                2.1537     -0.6397     -1.3504
H                1.2286     -0.9192     -1.8287
H                2.8955     -1.4214     -1.4814
H                2.5238      0.2880     -1.7718
H                0.6550     -2.5368     -0.1601
H               -0.9698     -3.2607      0.0383
H               -0.1653     -2.4725      1.4293
H               -2.5654     -0.5685      1.8320
H               -3.4274     -1.3306      0.4612
H               -3.1344      0.4350      0.4636
H               -0.2411     -0.8156     -2.4326
H               -1.6439      0.2826     -2.2611
H               -1.8982     -1.4868     -2.3508
H                1.3379      0.7742      2.1639
H               -0.1997     -0.0970      2.4465
H               -0.1997      1.6840      2.2690
H                1.9578      2.9857      0.2986
H                0.4982      3.0689      1.3310
H                0.4982      3.8429     -0.2828
30
M27
H                0.2264      1.6940     -1.3951
C                0.3533      1.6837     -0.3270
C                0.1069      0.5831      0.4147
C                0.8235      2.9972      0.3035
Si              -1.0857     -0.8177     -0.1294
C                0.2781      0.7428      1.9277
C               -0.3218     -2.4542      0.3441
C               -1.2290     -0.6967     -1.9869
C               -2.7029     -0.5144      0.7527
C                1.9586     -0.4460      0.1012
O                2.3384     -0.6174      1.1562
C                2.1582     -0.6456     -1.3489
H                1.2415     -0.9271     -1.8416
H                2.9017     -1.4277     -1.4631
H                2.5364      0.2787     -1.7709
H               -2.5387     -0.5401      1.8360
H               -3.4227     -1.2925      0.4738
H               -3.0969      0.4673      0.4661
H                0.6446     -2.5660     -0.1608
H               -0.9885     -3.2697      0.0415
H               -0.1730     -2.4875      1.4294
H               -0.2391     -0.8266     -2.4390
H               -1.6288      0.2868     -2.2592
H               -1.9034     -1.4793     -2.3530
H                1.9191      3.0245      0.3166
H                0.4440      3.0664      1.3294
H                0.4440      3.8410     -0.2841
H                1.3457      0.7688      2.1738
H               -0.1945     -0.1029      2.4401
H               -0.1945      1.6769      2.2522
30
M28
H                0.2535      1.6831     -1.4012
C                0.3604      1.6782     -0.3308
C                0.1414      0.5656      0.4083
C                0.7784      3.0058      0.3070
Si              -1.0743     -0.8258     -0.1328
C                0.2879      0.7350      1.9228
C               -0.3276     -2.4689      0.3448
C               -1.2227     -0.6980     -1.9895
C               -2.6807     -0.4896      0.7573
C                1.9398     -0.4404      0.1014
O                2.3464     -0.6260      1.1488
C                2.1643     -0.6518     -1.3472
H                1.2560     -0.9356     -1.8537
H                2.9093     -1.4337     -1.4460
H                2.5502      0.2693     -1.7697
H               -2.5106     -0.5138      1.8397
H               -3.4160     -1.2556      0.4858
H               -3.0585      0.4980      0.4688
H                0.6367     -2.5929     -0.1612
H               -1.0037     -3.2781      0.0459
H               -0.1774     -2.5004      1.4300
H               -0.2360     -0.8383     -2.4454
H               -1.6118      0.2909     -2.2577
H               -1.9075     -1.4716     -2.3554
H                1.3514      0.7644      2.1859
H               -0.1914     -0.1084      2.4328
H               -0.1914      1.6702      2.2339
H                1.8722      3.0682      0.3370
H                0.3812      3.0621      1.3269
H                0.3812      3.8373     -0.2863
30
M29
H                0.2851      1.6725     -1.4072
C                0.3679      1.6727     -0.3347
C                0.1778      0.5485      0.4021
C                0.7260      3.0143      0.3102
Si              -1.0621     -0.8336     -0.1361
C                0.2970      0.7272      1.9179
C               -0.3302     -2.4821      0.3461
C               -1.2151     -0.6995     -1.9919
C               -2.6574     -0.4661      0.7616
C                1.9230     -0.4356      0.1015
O                2.3556     -0.6346      1.1415
C                2.1719     -0.6578     -1.3454
H                1.2718     -0.9441     -1.8650
H                2.9183     -1.4392     -1.4304
H                2.5649      0.2601     -1.7686
H                0.6318     -2.6172     -0.1614
H               -1.0146     -3.2859      0.0518
H               -0.1780     -2.5109      1.4311
H               -2.4818     -0.4895      1.8432
H               -3.4076     -1.2200      0.4969
H               -3.0194      0.5269      0.4716
H               -0.2316     -0.8506     -2.4514
H               -1.5929      0.2947     -2.2565
H               -1.9104     -1.4637     -2.3574
H                1.3556      0.7604      2.1998
H               -0.1897     -0.1142      2.4244
H               -0.1897      1.6633      2.2148
H                1.8161      3.1166      0.3594
H                0.3091      3.0556      1.3230
H                0.3091      3.8311     -0.2901
30
M30
H                0.3218      1.6622     -1.4131
C                0.3760      1.6672     -0.3387
C                0.2163      0.5323      0.3962
C                0.6652      3.0220      0.3130
Si              -1.0490     -0.8410     -0.1395
C                0.3049      0.7192      1.9131
C               -0.3289     -2.4930      0.3484
C               -1.2059     -0.7010     -1.9946
C               -2.6330     -0.4438      0.7655
C                1.9086     -0.4315      0.1014
O                2.3661     -0.6429      1.1343
C                2.1810     -0.6635     -1.3434
H                1.2890     -0.9524     -1.8757
H                2.9287     -1.4443     -1.4160
H                2.5806      0.2512     -1.7678
H                0.6307     -2.6380     -0.1609
H               -1.0204     -3.2926      0.0593
H               -0.1742     -2.5181      1.4331
H               -2.4520     -0.4669      1.8462
H               -3.3972     -1.1857      0.5071
H               -2.9796      0.5543      0.4744
H               -0.2258     -0.8635     -2.4574
H               -1.5722      0.2984     -2.2559
H               -1.9119     -1.4558     -2.3595
H                1.2894      1.1238      2.1745
H                0.1639     -0.2478      2.4093
H               -0.4752      1.4155      2.2416
H                1.7489      3.1695      0.3839
H                0.2269      3.0454      1.3172
H                0.2269      3.8212     -0.2957
30
M31
H                0.4108      1.6458     -1.4221
C                0.3945      1.6565     -0.3464
C                0.2986      0.5038      0.3855
C                0.5180      3.0318      0.3149
Si              -1.0204     -0.8535     -0.1458
C                0.3194      0.7018      1.9035
C               -0.3139     -2.5072      0.3562
C               -1.1834     -0.7042     -1.9997
C               -2.5819     -0.4024      0.7729
C                1.8875     -0.4242      0.1013
O                2.3910     -0.6582      1.1209
C                2.2035     -0.6730     -1.3390
H                1.3268     -0.9673     -1.8947
H                2.9530     -1.4524     -1.3900
H                2.6156      0.2352     -1.7667
H                0.6410     -2.6676     -0.1574
H               -1.0152     -3.3030      0.0804
H               -0.1526     -2.5217      1.4401
H               -2.3909     -0.4264      1.8518
H               -3.3718     -1.1209      0.5256
H               -2.8998      0.6049      0.4804
H               -0.2102     -0.8902     -2.4681
H               -1.5254      0.3050     -2.2562
H               -1.9103     -1.4396     -2.3629
H                1.2592      1.1839      2.1962
H                0.2381     -0.2718      2.4001
H               -0.5241      1.3352      2.2009
H                1.5774      3.2849      0.4365
H                0.0325      3.0098      1.2972
H                0.0325      3.7853     -0.3158
30
M32
H                0.4626      1.6410     -1.4242
C                0.4048      1.6517     -0.3498
C                0.3419      0.4923      0.3811
C                0.4317      3.0316      0.3128
Si              -1.0052     -0.8582     -0.1486
C                0.3263      0.6923      1.8989
C               -0.2998     -2.5098      0.3619
C               -1.1702     -0.7056     -2.0020
C               -2.5555     -0.3828      0.7766
C                1.8811     -0.4203      0.1014
O                2.4053     -0.6648      1.1150
C                2.2166     -0.6762     -1.3365
H                1.3472     -0.9733     -1.9029
H                2.9668     -1.4550     -1.3779
H                2.6346      0.2284     -1.7663
H               -2.3598     -0.4078      1.8547
H               -3.3570     -1.0900      0.5343
H               -2.8599      0.6287      0.4840
H                0.6528     -2.6754     -0.1541
H               -1.0036     -3.3061      0.0942
H               -0.1346     -2.5173      1.4454
H               -0.2004     -0.9036     -2.4727
H               -1.4999      0.3080     -2.2572
H               -1.9071     -1.4315     -2.3642
H                1.2401      1.2123      2.2083
H                0.2753     -0.2834      2.3955
H               -0.5477      1.2912      2.1795
H                1.4712      3.3446      0.4631
H               -0.0785      2.9817      1.2816
H               -0.0785      3.7565     -0.3318
30
M33
H                0.5185      1.6398     -1.4242
C                0.4155      1.6474     -0.3530
C                0.3863      0.4836      0.3772
C                0.3376      3.0262      0.3078
Si              -0.9895     -0.8612     -0.1510
C                0.3328      0.6819      1.8944
C               -0.2816     -2.5086      0.3692
C               -1.1560     -0.7065     -2.0041
C               -2.5289     -0.3629      0.7806
C                1.8776     -0.4156      0.1016
O                2.4205     -0.6702      1.1097
C                2.2308     -0.6780     -1.3337
H                1.3683     -0.9778     -1.9104
H                2.9813     -1.4563     -1.3662
H                2.6545      0.2230     -1.7660
H               -2.3285     -0.3892      1.8578
H               -3.3412     -1.0593      0.5430
H               -2.8205      0.6522      0.4879
H                0.6690     -2.6779     -0.1494
H               -0.9863     -3.3071      0.1103
H               -0.1120     -2.5079      1.4520
H               -0.1897     -0.9166     -2.4765
H               -1.4735      0.3112     -2.2587
H               -1.9027     -1.4231     -2.3649
H                1.2181      1.2391      2.2214
H                0.3125     -0.2953      2.3901
H               -0.5705      1.2440      2.1577
H                1.3510      3.4027      0.4882
H               -0.1970      2.9448      1.2611
H               -0.1970      3.7183     -0.3529
30
M34
H                0.5776      1.6427     -1.4211
C                0.4265      1.6437     -0.3557
C                0.4313      0.4775      0.3742
C                0.2371      3.0146      0.2992
Si              -0.9735     -0.8625     -0.1530
C                0.3393      0.6710      1.8902
C               -0.2597     -2.5039      0.3781
C               -1.1411     -0.7073     -2.0060
C               -2.5018     -0.3427      0.7849
C                1.8770     -0.4099      0.1022
O                2.4366     -0.6745      1.1052
C                2.2457     -0.6782     -1.3305
H                1.3900     -0.9807     -1.9167
H                2.9964     -1.4563     -1.3544
H                2.6751      0.2190     -1.7655
H               -2.2970     -0.3704      1.8613
H               -3.3244     -1.0284      0.5518
H               -2.7812      0.6759      0.4923
H                0.6892     -2.6754     -0.1429
H               -0.9636     -3.3062      0.1288
H               -0.0858     -2.4937      1.4601
H               -0.1782     -0.9297     -2.4798
H               -1.4466      0.3139     -2.2609
H               -1.8971     -1.4151     -2.3649
H                1.1939      1.2641      2.2353
H                0.3499     -0.3071      2.3846
H               -0.5917      1.1945      2.1358
H                1.2172      3.4571      0.5106
H               -0.3208      2.8983      1.2354
H               -0.3208      3.6697     -0.3796
30
M35
H                0.6388      1.6502     -1.4150
C                0.4376      1.6406     -0.3578
C                0.4766      0.4746      0.3721
C                0.1308      2.9952      0.2863
Si              -0.9572     -0.8618     -0.1543
C                0.3456      0.6595      1.8862
C               -0.2341     -2.4952      0.3888
C               -1.1259     -0.7077     -2.0073
C               -2.4745     -0.3214      0.7898
C                1.8797     -0.4027      0.1035
O                2.4537     -0.6777      1.1017
C                2.2615     -0.6766     -1.3268
H                1.4120     -0.9817     -1.9217
H                3.0121     -1.4547     -1.3423
H                2.6964      0.2168     -1.7645
H               -2.2652     -0.3504      1.8653
H               -3.3068     -0.9968      0.5613
H               -2.7422      0.7003      0.4972
H                0.7133     -2.6674     -0.1346
H               -0.9355     -3.3028      0.1498
H               -0.0557     -2.4743      1.4699
H               -0.1663     -0.9420     -2.4822
H               -1.4198      0.3166     -2.2634
H               -1.8905     -1.4072     -2.3640
H                1.1671      1.2872      2.2500
H                0.3875     -0.3187      2.3787
H               -0.6116      1.1424      2.1138
H                1.0700      3.5055      0.5289
H               -0.4486      2.8407      1.2037
H               -0.4486      3.6093     -0.4126
30
M36
H                0.7004      1.6628     -1.4053
C                0.4482      1.6380     -0.3596
C                0.5217      0.4747      0.3709
C                0.0212      2.9675      0.2683
Si              -0.9410     -0.8589     -0.1551
C                0.3512      0.6478      1.8825
C               -0.2058     -2.4823      0.4013
C               -1.1109     -0.7080     -2.0083
C               -2.4470     -0.2984      0.7954
C                1.8858     -0.3942      0.1053
O                2.4714     -0.6801      1.0991
C                2.2780     -0.6733     -1.3225
H                1.4340     -0.9807     -1.9251
H                3.0280     -1.4518     -1.3302
H                2.7182      0.2162     -1.7632
H                0.7406     -2.6539     -0.1242
H               -0.9032     -3.2965      0.1732
H               -0.0232     -2.4495      1.4815
H               -2.2330     -0.3287      1.8699
H               -3.2888     -0.9636      0.5716
H               -2.7033      0.7263      0.5028
H               -0.1548     -0.9544     -2.4840
H               -1.3937      0.3188     -2.2668
H               -1.8839     -1.3999     -2.3618
H                1.1370      1.3089      2.2655
H                0.4251     -0.3297      2.3728
H               -0.6305      1.0880      2.0914
H                0.9117      3.5453      0.5413
H               -0.5768      2.7722      1.1658
H               -0.5768      3.5366     -0.4525
30
M37
H                0.7596      1.6802     -1.3929
C                0.4576      1.6360     -0.3611
C                0.5661      0.4783      0.3708
C               -0.0900      2.9307      0.2453
Si              -0.9250     -0.8537     -0.1552
C                0.3562      0.6362      1.8791
C               -0.1754     -2.4654      0.4160
C               -1.0963     -0.7085     -2.0086
C               -2.4193     -0.2730      0.8017
C                1.8960     -0.3839      0.1080
O                2.4901     -0.6819      1.0977
C                2.2952     -0.6679     -1.3177
H                1.4557     -0.9772     -1.9263
H                3.0442     -1.4472     -1.3182
H                2.7403      0.2176     -1.7615
H               -2.2005     -0.3044      1.8751
H               -3.2703     -0.9280      0.5830
H               -2.6642      0.7543      0.5086
H                0.7704     -2.6355     -0.1111
H               -0.8673     -3.2872      0.1993
H                0.0109     -2.4195      1.4951
H               -0.1436     -0.9668     -2.4850
H               -1.3688      0.3202     -2.2709
H               -1.8771     -1.3936     -2.3581
H                1.1035      1.3298      2.2813
H                0.4633     -0.3393      2.3670
H               -0.6483      1.0313      2.0688
H                0.7442      3.5744      0.5467
H               -0.7032      2.6928      1.1220
H               -0.7032      3.4519     -0.4988
30
M38
H                0.8123      1.7007     -1.3785
C                0.4645      1.6337     -0.3627
C                0.6089      0.4847      0.3721
C               -0.1987      2.8858      0.2171
Si              -0.9097     -0.8463     -0.1546
C                0.3605      0.6255      1.8762
C               -0.1448     -2.4449      0.4328
C               -1.0832     -0.7096     -2.0085
C               -2.3920     -0.2450      0.8082
C                1.9106     -0.3726      0.1118
O                2.5095     -0.6843      1.0978
C                2.3133     -0.6610     -1.3122
H                1.4766     -0.9716     -1.9247
H                3.0607     -1.4417     -1.3070
H                2.7626      0.2207     -1.7595
H                0.8008     -2.6130     -0.0951
H               -0.8304     -3.2750      0.2276
H                0.0441     -2.3851      1.5108
H               -2.1686     -0.2772      1.8807
H               -3.2523     -0.8897      0.5948
H               -2.6254      0.7847      0.5144
H               -0.1340     -0.9799     -2.4851
H               -1.3461      0.3202     -2.2759
H               -1.8714     -1.3890     -2.3527
H                1.0664      1.3507      2.2968
H                0.5022     -0.3465      2.3625
H               -0.6650      0.9729      2.0462
H                0.5744      3.5908      0.5436
H               -0.8227      2.6055      1.0735
H               -0.8227      3.3576     -0.5506
30
M39
H                0.8515      1.7200     -1.3659
C                0.4673      1.6301     -0.3651
C                0.6483      0.4929      0.3749
C               -0.2986      2.8356      0.1864
Si              -0.8960     -0.8372     -0.1534
C                0.3650      0.6166      1.8743
C               -0.1172     -2.4225      0.4513
C               -1.0725     -0.7121     -2.0078
C               -2.3665     -0.2147      0.8141
C                1.9293     -0.3611      0.1167
O                2.5293     -0.6887      1.0994
C                2.3321     -0.6530     -1.3063
H                1.4959     -0.9641     -1.9200
H                3.0773     -1.4356     -1.2978
H                2.7843      0.2252     -1.7576
H               -2.1389     -0.2471      1.8857
H               -3.2358     -0.8489      0.6058
H               -2.5879      0.8172      0.5186
H                0.8290     -2.5892     -0.0762
H               -0.7963     -3.2605      0.2569
H                0.0730     -2.3486      1.5281
H               -0.1269     -0.9943     -2.4847
H               -1.3267      0.3182     -2.2820
H               -1.8676     -1.3867     -2.3455
H                1.0283      1.3724      2.3103
H                0.5425     -0.3495      2.3606
H               -0.6786      0.9154      2.0255
H                0.4133      3.5933      0.5332
H               -0.9288      2.5158      1.0242
H               -0.9288      3.2605     -0.6032
30
M40
H                0.8698      1.7311     -1.3598
C                0.4643      1.6234     -0.3693
C                0.6822      0.5010      0.3789
C               -0.3820      2.7856      0.1570
Si              -0.8854     -0.8274     -0.1519
C                0.3721      0.6112      1.8741
C               -0.0968     -2.4014      0.4698
C               -1.0644     -0.7153     -2.0069
C               -2.3450     -0.1835      0.8180
C                1.9501     -0.3513      0.1222
O                2.5481     -0.6962      1.1021
C                2.3508     -0.6445     -1.3009
H                1.5133     -0.9554     -1.9133
H                3.0937     -1.4291     -1.2918
H                2.8041      0.2313     -1.7557
H                0.8503     -2.5680     -0.0561
H               -0.7708     -3.2455      0.2848
H                0.0932     -2.3146      1.5457
H               -2.1147     -0.2155      1.8890
H               -3.2228     -0.8073      0.6142
H               -2.5543      0.8502      0.5200
H               -0.1221     -1.0094     -2.4833
H               -1.3102      0.3149     -2.2886
H               -1.8658     -1.3857     -2.3378
H                0.9947      1.3956      2.3194
H                0.5855     -0.3462      2.3630
H               -0.6858      0.8632      2.0102
H                0.2771      3.5833      0.5182
H               -1.0145      2.4336      0.9799
H               -1.0145      3.1719     -0.6504
30
M41
H                0.8658      1.7279     -1.3632
C                0.4555      1.6119     -0.3757
C                0.7090      0.5070      0.3840
C               -0.4444      2.7414      0.1326
Si              -0.8790     -0.8181     -0.1505
C                0.3832      0.6102      1.8763
C               -0.0863     -2.3839      0.4865
C               -1.0587     -0.7185     -2.0061
C               -2.3300     -0.1544      0.8189
C                1.9698     -0.3453      0.1275
O                2.5640     -0.7067      1.1048
C                2.3684     -0.6363     -1.2964
H                1.5291     -0.9468     -1.9069
H                3.1101     -1.4222     -1.2892
H                2.8210      0.2389     -1.7528
H               -2.0990     -0.1859      1.8898
H               -3.2153     -0.7684      0.6179
H               -2.5275      0.8809      0.5181
H                0.8618     -2.5523     -0.0368
H               -0.7576     -3.2317      0.3084
H                0.1021     -2.2866      1.5618
H               -0.1193     -1.0239     -2.4811
H               -1.2962      0.3116     -2.2954
H               -1.8659     -1.3847     -2.3313
H                0.9707      1.4202      2.3234
H                0.6306     -0.3363      2.3706
H               -0.6849      0.8204      2.0034
H                0.1769      3.5647      0.5032
H               -1.0771      2.3667      0.9453
H               -1.0771      3.1012     -0.6868
30
M42
H                0.8462      1.7106     -1.3740
C                0.4429      1.5959     -0.3835
C                0.7298      0.5101      0.3896
C               -0.4903      2.7035      0.1129
Si              -0.8766     -0.8101     -0.1489
C                0.3994      0.6132      1.8810
C               -0.0839     -2.3706      0.5009
C               -1.0543     -0.7208     -2.0053
C               -2.3215     -0.1288      0.8175
C                1.9856     -0.3432      0.1320
O                2.5759     -0.7191      1.1070
C                2.3844     -0.6287     -1.2928
H                1.5444     -0.9391     -1.9030
H                3.1264     -1.4142     -1.2885
H                2.8348      0.2482     -1.7479
H               -2.0917     -0.1599      1.8887
H               -3.2129     -0.7343      0.6174
H               -2.5080      0.9076      0.5138
H                0.8652     -2.5423     -0.0196
H               -0.7543     -3.2202      0.3280
H                0.1027     -2.2653      1.5757
H               -0.1172     -1.0372     -2.4776
H               -1.2830      0.3094     -2.3013
H               -1.8669     -1.3823     -2.3267
H                0.9590      1.4457      2.3225
H                0.6779     -0.3208      2.3823
H               -0.6753      0.7885      2.0058
H                0.1062      3.5426      0.4889
H               -1.1225      2.3145      0.9192
H               -1.1225      3.0464     -0.7141
